On-Board Cryopumps provide fast, clean pumping of all gases in the 10-3to 10-9 Torr range. An On-Board Cryopump operates on the principle that gases can be condensed and held at extremely low vapor pressures, achieving high speeds and throughputs as described
The On-Board Cryopump is a highly-reliable and rugged unit that require little maintenance. Since the On-Board Cryopump exposes no moving parts, operating fluids, or backing pumps to the vacuum, the possibility o system or process contamination from the On-Board Cryopump is eliminated.